MicroNanoFabrication Annual Review Meeting – 23rd Edition

The posters show the research projects realized during the last 12 months in the EPFL Center of MicroNanoTechnology (CMi).

The scope of the forum is Micro & Nano Fabrication Techniques used in the following fields:

• - Nanostructure Physics (VCSELs, Quantum Opto-Electronics, III/V Devices, Nanotubes, Nanowires, Nanomechanics, ...)
• - Quantum sciences and technology (quantum opto- electro- mechanics, superconducting devices, QDs, sensors, circuits)
• - Micro and Nanoelectronics (Soft Bioelectronic, 3D Integration, Nanowires, High-Q Resonators, New materials, ...)
• - Biomedical Applications (Microfluidics, Microelectrodes, Lab on a Chip, Probes, Neuroprosthetics, ...)
• - MEMS, NEMS (Sensors and Actuators, Motors, Tweezers, Artificial Muscles, Micro and Nanomechanics, ...)
• - Optics (Nanophotonics, Optomechanics, Photonic Crystals, MOEMS, Optofluidics, Fibers, ...)
• -Green Micro- and Nano-fabrication (Energy conversion, Catalytic Processing, Functional Materials, Chemistry …)
• - Material Sciences (Photovoltaic Materials, Piezoelectric materials, Nanoparticles, Energy Harvesting, Micro Fuel Cells, ...)
• - Fabrication Technologies (Lithography, Etching, Thin Films, ALD, EBEAM, CMP, Self assembly, Inkjet Printing, PDMS, ...)
• - Metrology and Defect Analysis (SEM, FIB, Ellipsometry, Reflectometry, AFM, EDX, Stress, Conductivity, ...)
• - Packaging and Assembly (Grinding, Wire Bonding, Encapsulation, ...)