MicroNanoFabrication Annual Review Meeting – 24th Edition
Scope of the conference
The Networking Forum
- - presenting research achievements of the past year
- - encouraging interaction among professors, researchers, students and industry partners
The posters show the research projects realized during the last 12 months in the EPFL Center of MicroNanoTechnology (CMi).
The scope of the forum is Micro & Nano Fabrication Techniques used in the following fields:
- - Nanostructure Physics (VCSELs, Quantum Opto-Electronics, III/V Devices, Nanotubes, Nanowires, Nanomechanics, ...)
- - Quantum sciences and technology (quantum opto- electro- mechanics, superconducting devices, QDs, sensors, circuits)
- - Micro and Nanoelectronics (Soft Bioelectronic, 3D Integration, Nanowires, High-Q Resonators, New materials, ...)
- - Biomedical Applications (Microfluidics, Microelectrodes, Lab on a Chip, Probes, Neuroprosthetics, ...)
- - MEMS, NEMS (Sensors and Actuators, Motors, Tweezers, Artificial Muscles, Micro and Nanomechanics, ...)
- - Optics (Nanophotonics, Optomechanics, Photonic Crystals, MOEMS, Optofluidics, Fibers, ...)
- -Green Micro- and Nano-fabrication (Energy conversion, Catalytic Processing, Functional Materials, Chemistry …)
- - Material Sciences (Photovoltaic Materials, Piezoelectric materials, Nanoparticles, Energy Harvesting, Micro Fuel Cells, ...)
- - Fabrication Technologies (Lithography, Etching, Thin Films, ALD, EBEAM, CMP, Self assembly, Inkjet Printing, PDMS, ...)
- - Metrology and Defect Analysis (SEM, FIB, Ellipsometry, Reflectometry, AFM, EDX, Stress, Conductivity, ...)
- - Packaging and Assembly (Grinding, Wire Bonding, Encapsulation, ...)
About us
The CMi is a complex of cleanrooms and processing equipment for the training and scientific experimentation devoted to the users of microtechnologies.
The CMi is a technological platform with a large stock of micro- and nano-manufacturing equipment. A multidisciplinary team of 20 people is in charge of its operation and evolution. The platform welcomes more than 500 users annually, mainly EPFL doctoral students, but also postdocs, students, internal and external researchers, as well as industrialists, who all carry out their own processes. The challenges are multiple, whether it is to offer processes of the highest level, satisfying the needs of the research, to provide training, to offer expertise and advice, or to guarantee safety.
